Concepedia

D. G. Park

DG

Statistics

Publications

1

Citations

49

H-Index

1

Active since

1996

Affiliations

University of Illinois Urbana-Champaign(Current)

D. G. Park is an author at University of Illinois Urbana-Champaign specializing in semiconductor device materials, semiconductor devices, and substrate temperature effects.

Publications per year

1996–1996

1

Publications

1

Gate quality Si3N4 prepared by low temperature remote plasma enhanced chemical vapor deposition for III–V semiconductor-based metal–insulator–semiconductor devices

D. G. Park, Ming Tao, D. Li et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 49 citations

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