14
Publications
1.3K
Citations
13
H-Index
1999
Active since
Scott D. Allen is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, microfabrication, and microelectronics.
Top concepts
EngineeringMaterial ScienceMicroelectronicsMicrofabricationApplied PhysicsChemistryElectrical EngineeringSurface ScienceElectronic PackagingPolymers
Publications per year
1999–2007
14
14
Effect of thin-film imaging on line edge roughness transfer to underlayers during etch processes
Darı́o L. Goldfarb, Arpan P. Mahorowala, Gregg M. Gallatin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 86 citations
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