Concepedia
Statistics
Publications
8
Citations
294
H-Index
Active since
1998
Affiliations
Lam Research (United States)(Current)
University of California, Berkeley
University of California, Santa Barbara
David Cooperberg is an author at Lam Research (United States) specializing in natural sciences, plasma physics, and plasma simulation.
Publications per year
1998–2006
Feature-scale model of Si etching in SF6∕O2 plasma and comparison with experiments
Rodolfo Jun Belen, Sergi Gomez, David Cooperberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 59 citations
Natural Sciences, Materials Engineering, Materials Science +17
Semiempirical profile simulation of aluminum etching in a Cl2/BCl3 plasma
David Cooperberg, Vahid Vahedi, Richard A. Gottscho · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 50 citations
Feature-scale model of Si etching in SF6 plasma and comparison with experiments
Rodolfo Jun Belen, Sergi Gomez, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 47 citations
Natural Sciences, Materials Science, Physics +17
Electron surface waves in a plasma slab with uniform ion density
David Cooperberg · Physics of Plasmas · 1998 · 34 citations
Natural Sciences, Physics, Plasma Physics +15
Surface wave sustained plasmas in a metal bound plasma slab
David Cooperberg, C.K. Birdsall · Plasma Sources Science and Technology · 1998 · 31 citations
Natural Sciences, Physics, Computational Electromagnetics +16
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