Concepedia
Statistics
Publications
8
Citations
289
H-Index
Active since
1998
Affiliations
Lam Research (United States)(Current)
University of California, Berkeley
University of California, Santa Barbara
David Cooperberg is an author at Lam Research (United States) specializing in engineering, applied physics, and plasma simulation.
Top concepts
EngineeringApplied PhysicsPhysicsPlasma SimulationElectrical EngineeringPlasma PhysicsPlasma WavesPlasma ScienceMicroelectronicsPlasma Theory
Publications per year
1998–2006
Feature-scale model of Si etching in SF6∕O2 plasma and comparison with experiments
Rodolfo Jun Belen, Sergi Gomez, David Cooperberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 57 citations
Engineering, Vacuum Device, Silicon On Insulator +16
Semiempirical profile simulation of aluminum etching in a Cl2/BCl3 plasma
David Cooperberg, Vahid Vahedi, Richard A. Gottscho · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 48 citations
Materials Engineering, Surface Characterization, Electrical Engineering +14
Feature-scale model of Si etching in SF6 plasma and comparison with experiments
Rodolfo Jun Belen, Sergi Gomez, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 47 citations
Feature-scale Model, Electrical Engineering, Engineering +12
Electron surface waves in a plasma slab with uniform ion density
David Cooperberg · Physics of Plasmas · 1998 · 34 citations
Engineering, Plasma Science, Plasma Physics +16
Surface wave sustained plasmas in a metal bound plasma slab
David Cooperberg, C.K. Birdsall · Plasma Sources Science and Technology · 1998 · 31 citations
Plasma Waves, Electrical Engineering, Electron Surface Waves +12
1–5 of 8