Statistics
Publications
6
Citations
266
H-Index
6
Active since
2004
Rodolfo Jun Belen is an author at Lam Research (United States) specializing in plasma-surface interactions, etching processes, and plasma etching.
Publications per year
2004–2006
6
6
Feature scale model of Si etching in SF6∕O2∕HBr plasma and comparison with experiments
Rodolfo Jun Belen, Sergi Gomez, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2006 · 24 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
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