Sergi Gomez

Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma

Sergi Gomez, P. G. Steen, W. G. Graham · Applied Physics Letters · 2002 · 116 citations

Materials Science, Atomic Oxygen Densities, Polypropylene Samples +13

Etching of high aspect ratio structures in Si using SF6/O2 plasma

Sergi Gomez, Rodolfo Jun Belen, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 96 citations

Engineering, Integrated Circuits, Vacuum Device +16

Feature-scale model of Si etching in SF6∕O2 plasma and comparison with experiments

Rodolfo Jun Belen, Sergi Gomez, David Cooperberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 57 citations

Engineering, Vacuum Device, Silicon On Insulator +16

Discharge kinetics of inductively coupled oxygen plasmas: experiment and model

Cormac Corr, Sergi Gomez, W. G. Graham · Plasma Sources Science and Technology · 2012 · 53 citations

Feature-scale model of Si etching in SF6 plasma and comparison with experiments

Rodolfo Jun Belen, Sergi Gomez, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 47 citations

Feature-scale Model, Electrical Engineering, Engineering +12