Concepedia

Mark Kiehlbauch

MK

13

Publications

545

Citations

13

H-Index

1999

Active since

Affiliations

University of California, Santa Barbara(Current)

Lam Research (United States)

University of California, Berkeley

University of Minnesota

Micron (United States)

Mark Kiehlbauch is an author at University of California, Santa Barbara specializing in engineering, applied physics, and surface science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMicroelectronicsMicrofabricationChemical KineticsElectrical EngineeringChemistryPlasma SimulationChemical Engineering

Publications per year

1999–2014

13

Publications

13

Etching of high aspect ratio structures in Si using SF6/O2 plasma

Sergi Gomez, Rodolfo Jun Belen, Mark Kiehlbauch et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 96 citations

Engineering, Integrated Circuits, Vacuum Device +16

Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Mark Kiehlbauch, David B. Graves · Journal of Applied Physics · 2002 · 66 citations

Electron Density, Engineering, Physics +15

Inductively coupled plasmas in oxygen: Modeling and experiment

Mark Kiehlbauch, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 65 citations

Cold Atmospheric Plasma, Engineering, Physics +14

Feature-scale model of Si etching in SF6∕O2 plasma and comparison with experiments

Rodolfo Jun Belen, Sergi Gomez, David Cooperberg et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 57 citations

Engineering, Vacuum Device, Silicon On Insulator +16

Temperature resolved modeling of plasma abatement of perfluorinated compounds

Mark Kiehlbauch, David B. Graves · Journal of Applied Physics · 2001 · 52 citations

Electrical Engineering, Chemical Engineering, Engineering +13

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