Concepedia

Rémi Dussart

RD

56

Publications

2K

Citations

25

H-Index

2000

Active since

Affiliations

Groupe de Recherches sur l'Energétique des Milieux Ionisés(Current)

Université d'Orléans

Centre National de la Recherche Scientifique

STMicroelectronics (France)

The University of Texas at Dallas

Rémi Dussart is an author at Groupe de Recherches sur l'Energétique des Milieux Ionisés specializing in engineering, applied physics, and physics.

ORCID

Top concepts

Publications per year

2000–2024

56

Publications

56

Plasma cryogenic etching of silicon: from the early days to today's advanced technologies

Rémi Dussart, Thomas Tillocher, Philippe Lefaucheux et al. · Journal of Physics D Applied Physics · 2014 · 255 citations

Passivation mechanisms in cryogenic SF<sub>6</sub>/O<sub>2</sub>etching process

Rémi Dussart, Mohamed Boufnichel, G. Marcos et al. · Journal of Micromechanics and Microengineering · 2003 · 105 citations

, , +12

Future of plasma etching for microelectronics: Challenges and opportunities

G. S. Oehrlein, Stephan M. Brandstadter, Robert L. Bruce et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2024 · 103 citations · Full text

, , +14

Si O x F y passivation layer in silicon cryoetching

X. Mellhaoui, Rémi Dussart, Thomas Tillocher et al. · Journal of Applied Physics · 2005 · 94 citations

, , +18

Silicon columnar microstructures induced by an SF<sub>6</sub>/O<sub>2</sub>plasma

Rémi Dussart, X. Mellhaoui, Thomas Tillocher et al. · Journal of Physics D Applied Physics · 2005 · 87 citations

, , +15

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