Concepedia

X. Mellhaoui

XM

Statistics

Publications

10

Citations

481

H-Index

10

Active since

2002

Affiliations

STMicroelectronics (France)(Current)

Groupe de Recherches sur l'Energétique des Milieux Ionisés

Centre National de la Recherche Scientifique

The University of Texas at Dallas

STMicroelectronics (Switzerland)

X. Mellhaoui is an author at STMicroelectronics (France) specializing in materials science, etching processes, and semiconductor devices.

Publications per year

2002–2008

10

Publications

10

Passivation mechanisms in cryogenic SF<sub>6</sub>/O<sub>2</sub>etching process

Rémi Dussart, Mohamed Boufnichel, G. Marcos et al. · Journal of Micromechanics and Microengineering · 2003 · 106 citations

, , +17

Si O x F y passivation layer in silicon cryoetching

X. Mellhaoui, Rémi Dussart, Thomas Tillocher et al. · Journal of Applied Physics · 2005 · 97 citations

, , +17

Silicon columnar microstructures induced by an SF<sub>6</sub>/O<sub>2</sub>plasma

Rémi Dussart, X. Mellhaoui, Thomas Tillocher et al. · Journal of Physics D Applied Physics · 2005 · 89 citations

, , +17

Two Cryogenic Processes Involving SF[sub 6], O[sub 2], and SiF[sub 4] for Silicon Deep Etching

Thomas Tillocher, Rémi Dussart, Lawrence Overzet et al. · Journal of The Electrochemical Society · 2008 · 38 citations

, , +15

The passivation layer formation in the cryo-etching plasma process

Rémi Dussart, X. Mellhaoui, Thomas Tillocher et al. · Microelectronic Engineering · 2007 · 37 citations

, , +14

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