S. Polamreddy - Concepedia

Author

S. Polamreddy

Also Known As

S. Polamreddy

Publications

201

Citations

H-Index

Concepts

All Affiliations

S. Polamreddy is an author at University of Arkansas at Fayetteville specializing in microelectronics, electrical engineering, and engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	201
2	Electrical Engineering	4	4	201
3	Materials Science	3	3	136
4	Applied Physics	1	1	32
5	Computer Engineering	1	1	65

S. Polamreddy

Publications

201

Citations

H-Index

Page 1

	Year	Citations
Process integration for through-silicon vias S. Spiesshoefer, Zia Ur Rahman, G. Vangara, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Process IntegrationEngineeringDevice IntegrationIntegrated CircuitsInterconnect (Integrated Circuits)	2005	77
Architectural implications and process development of 3-D VLSI Z-axis interconnects using through silicon vias L.W. Schaper, S. L. Burkett, S. Spiesshoefer, IEEE Transactions on Advanced Packaging EngineeringSilicon ViasProcess DevelopmentComputer ArchitectureTsv Requirements	2005	65
Effect of process parameters on via formation in Si using deep reactive ion etching I. U. Abhulimen, S. Polamreddy, S. L. Burkett, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringModified Bosch ProcessIntegrated CircuitsSilicon On InsulatorInterconnect (Integrated Circuits)	2007	32
Copper electroplating to fill blind vias for three-dimensional integration S. Spiesshoefer, Jaydeep Patel, Timothy T.-Y. Lam, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringSystem Level IntegrationSeed FilmsIntegrated CircuitsInterconnect (Integrated Circuits)	2006	27

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