S. Spiesshoefer

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Publications

Citations

290

H-Index

Active since

2004

Affiliations

University of Arkansas at Fayetteville(Current)

S. Spiesshoefer is an author at University of Arkansas at Fayetteville specializing in integrated circuit design, engineering, and integrated circuit fabrication.

Publications per year

2004–2006

Publications

Process integration for through-silicon vias

S. Spiesshoefer, Zia Ur Rahman, G. Vangara et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2005 · 77 citations

Engineering, Electrical Engineering, Materials Science +17

Architectural implications and process development of 3-D VLSI Z-axis interconnects using through silicon vias

L.W. Schaper, S. L. Burkett, S. Spiesshoefer et al. · IEEE Transactions on Advanced Packaging · 2005 · 65 citations

Engineering, Computer Engineering, Electrical Engineering +17

Control of sidewall slope in silicon vias using SF6∕O2 plasma etching in a conventional reactive ion etching tool

R. F. Figueroa, S. Spiesshoefer, S. L. Burkett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 46 citations

Engineering, Materials Engineering, Materials Science +14

Z-axis interconnects using fine pitch, nanoscale through-silicon vias: Process development

S. Spiesshoefer, L.W. Schaper, S. L. Burkett et al. · 2004 · 42 citations

Engineering, Computer Engineering, Electrical Engineering +17

IC stacking technology using fine pitch, nanoscale through silicon vias

S. Spiesshoefer, L.W. Schaper · 2004 · 32 citations

Engineering, Computer Engineering, Electrical Engineering +14

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