Concepedia

I. U. Abhulimen

IU

Statistics

Publications

3

Citations

89

H-Index

3

Active since

2006

Affiliations

University of Arkansas at Fayetteville(Current)

I. U. Abhulimen is an author at University of Arkansas at Fayetteville specializing in integrated circuit fabrication, semiconductor devices, and interconnect technology.

Publications per year

2006–2008

3

Publications

3

Effect of process parameters on via formation in Si using deep reactive ion etching

I. U. Abhulimen, S. Polamreddy, S. L. Burkett et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 34 citations

, , +17

Fabrication and testing of through-silicon vias used in three-dimensional integration

I. U. Abhulimen, A. Kamto, Y. Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2008 · 29 citations

, , +17

Back side exposure of variable size through silicon vias

T. Rowbotham, Jash Patel, Timothy T.-Y. Lam et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 26 citations

, , +17

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