Steven Verhaverbeke

The Etching Mechanisms of SiO2 in Hydrofluoric Acid

Steven Verhaverbeke, Ivo Teerlinck, Chris Vinckier et al. · Journal of The Electrochemical Society · 1994 · 141 citations

Natural Sciences, Chemistry, Materials Science +14

Spatially resolved electrical measurements of SiO2 gate oxides using atomic force microscopy

M. P. Murrell, Mark E. Welland, S. J. O’Shea et al. · Applied Physics Letters · 1993 · 129 citations

Engineering, Electrical Engineering, Materials Science +17

Surface reconstruction of hydrogen annealed (100) silicon

H. Bender, Steven Verhaverbeke, Matty Caymax et al. · Journal of Applied Physics · 1994 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +16

Megasonic cleaning of wafers in electrolyte solutions: Possible role of electro-acoustic and cavitation effects

Manish Keswani, S. Raghavan, Pierre A. Deymier et al. · Microelectronic Engineering · 2008 · 46 citations

Natural Sciences, Materials Engineering, Materials Science +15

The Relationship of the Silicon Surface Roughness and Gate Oxide Integrity in NH₄OH/H₂O₂ Mixtures

Marc Meuris, Steven Verhaverbeke, Paul Mertens et al. · Japanese Journal of Applied Physics · 1992 · 39 citations

Natural Sciences, Electrical Engineering, Materials Science +17