M. P. Murrell

Conducting atomic force microscopy study of silicon dioxide breakdown

S. J. O’Shea, R. M. Atta, M. P. Murrell et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 146 citations

Local Dielectric Strength, Engineering, Microscopy +19

Spatially resolved electrical measurements of SiO2 gate oxides using atomic force microscopy

M. P. Murrell, Mark E. Welland, S. J. O’Shea et al. · Applied Physics Letters · 1993 · 129 citations

Atomic Force Microscopy, Engineering, Microscopy +19

Comparison of charge-changing cross sections in gaseous and solid targets

Clifton Woods, C.J. Sofield, N. E. B. Cowern et al. · Journal of Physics B Atomic and Molecular Physics · 1984 · 36 citations

Engineering, Target Fabrication, Chemistry +16

Sputtering by MeV ions

S. Sugden, C.J. Sofield, M. P. Murrell · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 26 citations

Mev Ions, Engineering, Physics +5

Characterization of electron beam induced modification of thermally grown SiO2

J. R. Barnes, A. C. F. Hoole, M. P. Murrell et al. · Applied Physics Letters · 1995 · 15 citations

Materials Science, Electrical Engineering, Ion Implantation +15