D. G. Ballegeer

Statistics

Publications

Citations

178

H-Index

Active since

1991

Affiliations

University of Illinois Urbana-Champaign(Current)

National Laboratory of the Rockies

D. G. Ballegeer is an author at University of Illinois Urbana-Champaign specializing in semiconductor devices, semiconductor device materials, and electrical engineering.

Publications per year

1991–1997

Publications

A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs

Meiping Tong, D. G. Ballegeer, A. Ketterson et al. · Journal of Electronic Materials · 1992 · 69 citations

Engineering, Electrical Engineering, Materials Science +16

A comparative study of metal-semiconductor-metal photodetectors on GaAs with indium-tin-oxide and Ti/Au electrodes

Jai Woong Seo, A. Ketterson, D. G. Ballegeer et al. · IEEE Photonics Technology Letters · 1992 · 36 citations

Engineering, Electrical Engineering, Materials Science +17

Etching of indium tin oxide in methane/hydrogen plasmas

I. Adesida, D. G. Ballegeer, Jai Woong Seo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 35 citations

Engineering, Electrical Engineering, Materials Science +17

Structural modification in reactive-ion-etched <i>i</i>-InP and <i>n</i>+-InP studied by Raman scattering

James E. Maslar, Paul W. Bohn, D. G. Ballegeer et al. · Journal of Applied Physics · 1993 · 15 citations

Natural Sciences, Materials Science, Physics +17

Utilization of an electron beam resist process to examine the effects of asymmetric gate recess on the device characteristics of AlGaAs/InGaAs PHEMTs

R. Grundbacher, D. G. Ballegeer, A. Ketterson et al. · IEEE Transactions on Electron Devices · 1997 · 12 citations

Engineering, Electrical Engineering, Microelectronics +14

1–5 of 6