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A comparative study of wet and dry selective etching processes for GaAs/AIGaAs/lnGaAs pseudomorphic MODFETs

DOI

69

Citations

14

References

1992

Year

Meiping Tong, D. G. Ballegeer, A. Ketterson, E. J. Roan, K. Y. Cheng, I. Adesida
Journal of Electronic Materials

References

YearCitations

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