William Earley

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Active since

2012

Affiliations

University at Albany, State University of New York(Current)

SUNY Polytechnic Institute

Argonne National Laboratory

William Earley is an author at University at Albany, State University of New York specializing in materials science, natural sciences, and electronic materials.

Publications per year

2012–2017

Publications

Studying secondary electron behavior in EUV resists using experimentation and modeling

Amrit Narasimhan, Steven Grzeskowiak, Bharath Srivats et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +13

Chain-Scission Polyethers for EUV Lithography

Brian Cardineau, Pascal Garczynski, William Earley et al. · Journal of Photopolymer Science and Technology · 2013 · 22 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Advanced development techniques for metal-based EUV resists

Jodi Hotalen, Michael Murphy, William Earley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 17 citations · Full text

Natural Sciences, Chemistry, Materials Science +11

Cross sections of photoacid generators at low electron energies

Steven Grzeskowiak, Amrit Narasimhan, Jonathan Ostrander et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2015 · 14 citations

Natural Sciences, Electrical Engineering, Materials Science +14

Synthesis of stable acid amplifiers that produce strong highly-fluorinated polymer-bound acid

Kenji Hosoi, Brian Cardineau, William Earley et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +11

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