Amrit Narasimhan

Probing and repairing damaged surfaces with nanoparticle-containing microcapsules

Katrina Kratz, Amrit Narasimhan, Ravisubhash Tangirala et al. · Nature Nanotechnology · 2012 · 62 citations

Engineering, Biomedical Engineering, Materials Science +12

What We Don’t Know About EUV Exposure Mechanisms

Amrit Narasimhan, Liam Wisehart, Steven Grzeskowiak et al. · Journal of Photopolymer Science and Technology · 2017 · 41 citations · Full text

Natural Sciences, Chemistry, Materials Science +15

Studying secondary electron behavior in EUV resists using experimentation and modeling

Amrit Narasimhan, Steven Grzeskowiak, Bharath Srivats et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +13

Acid Generation Efficiency of EUV PAGs via Low Energy Electron Exposure

Steven Grzeskowiak, Amrit Narasimhan, Eliran Rebeyev et al. · Journal of Photopolymer Science and Technology · 2016 · 25 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +13

Electron trapping: a mechanism for acid production in extreme ultraviolet photoresists

Steven Grzeskowiak, Jake Kaminsky, Sean Gibbons et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2018 · 24 citations

Natural Sciences, Chemistry, Materials Science +14