Bharath Srivats

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Active since

2014

Affiliations

Center for Nanoscale Science and Technology(Current)

Argonne National Laboratory

Bharath Srivats is an author at Center for Nanoscale Science and Technology specializing in materials science, surface science, and electron beam physics.

Publications per year

2014–2015

Publications

Studying secondary electron behavior in EUV resists using experimentation and modeling

Amrit Narasimhan, Steven Grzeskowiak, Bharath Srivats et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +13

Electron Penetration Depths in EUV Photoresists

Justin Torok, Bharath Srivats, Shahid Hussain Memon et al. · Journal of Photopolymer Science and Technology · 2014 · 22 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +14

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