Concepedia

Charles L. Dezelah

CL

Statistics

Publications

16

Citations

661

H-Index

15

Active since

2004

Affiliations

Wayne State University(Current)

University of Helsinki

Oregon State University

Uppsala University

The University of Texas at Dallas

Charles L. Dezelah is an author at Wayne State University specializing in engineering, materials science, and surface science.

ORCID

Top concepts

Publications per year

2004–2021

16

Publications

16

Atomic Layer Deposition of Ga<sub>2</sub>O<sub>3</sub> Films from a Dialkylamido-Based Precursor

Charles L. Dezelah, Jaakko Niinistö, Kai Arstila et al. · Chemistry of Materials · 2005 · 89 citations

, , +14

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor

Dustin Z. Austin, Melanie A. Jenkins, Derryl Allman et al. · Chemistry of Materials · 2017 · 79 citations

, , +17

Synthesis, structure and properties of volatile lanthanide complexes containing amidinate ligands: application for Er2O3 thin film growth by atomic layer deposition

Jani Päiväsaari, Charles L. Dezelah, Dwayne Back et al. · Journal of Materials Chemistry · 2005 · 72 citations

, , +13

The Atomic Layer Deposition of HfO<sub>2</sub> and ZrO<sub>2</sub> using Advanced Metallocene Precursors and H<sub>2</sub>O as the Oxygen Source

Charles L. Dezelah, Jaakko Niinistö, Kaupo Kukli et al. · Chemical Vapor Deposition · 2008 · 56 citations

, , +17

Atomic Layer Deposition of Tungsten(III) Oxide Thin Films from W<sub>2</sub>(NMe<sub>2</sub>)<sub>6</sub>and Water:  Precursor-Based Control of Oxidation State in the Thin Film Material

Charles L. Dezelah, Oussama M. El‐Kadri, Imre Miklós Szilágyi et al. · Journal of the American Chemical Society · 2006 · 44 citations

, , +16

1–5 of 16