Dustin Z. Austin

Atomic Layer Deposition of Ruthenium and Ruthenium Oxide Using a Zero-Oxidation State Precursor

Dustin Z. Austin, Melanie A. Jenkins, Derryl Allman et al. · Chemistry of Materials · 2017 · 79 citations

Engineering, Oxidation Resistance, Solid-state Chemistry +17

Review—Beyond the Highs and Lows: A Perspective on the Future of Dielectrics Research for Nanoelectronic Devices

Melanie A. Jenkins, Dustin Z. Austin, John F. Conley et al. · ECS Journal of Solid State Science and Technology · 2019 · 27 citations

Plasma Enhanced Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub>/SiO<sub>2</sub> MIM Capacitors

Dustin Z. Austin, Derryl Allman, David Price et al. · IEEE Electron Device Letters · 2015 · 21 citations

Materials Science, Electrical Engineering, Engineering +12

Atomic layer deposition of bismuth oxide using Bi(OCMe2iPr)3 and H2O

Dustin Z. Austin, Derryl Allman, David Price et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 14 citations

Engineering, X-ray Reflectivity, Thin Film Process Technology +16

Electrode modulated capacitance-electric field nonlinearity in metal-insulator-metal capacitors

Dustin Z. Austin, Konner E. K. Holden, Joshua Hinz et al. · Applied Physics Letters · 2017 · 12 citations

Materials Science, Electrical Engineering, Dielectrics +14