32
Publications
2.2K
Citations
25
H-Index
1999
Active since
Andy Fan is an author at Massachusetts Institute of Technology specializing in engineering, microelectronics, and electronic packaging.
Top concepts
EngineeringMicroelectronicsElectronic PackagingMaterial ScienceApplied Physics3D IntegrationMaterials EngineeringElectrical EngineeringSurface ScienceMicrofabrication
Publications per year
1999–2022
32
32
Andy Fan · Electrochemical and Solid-State Letters · 1999 · 211 citations
Materials Science, Tantalum Diffusion Barrier, Wafer Scale Processing +12
Fabrication technologies for three-dimensional integrated circuits
R. Reif, Andy Fan, Kuan‐Neng Chen et al. · 2003 · 127 citations
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