Concepedia

Lutz Bettin

LB

Statistics

Publications

3

Citations

44

H-Index

3

Active since

2005

Affiliations

Vistec Electron Beam (Germany)(Current)

Lutz Bettin is an author at Vistec Electron Beam (Germany) specializing in engineering, external beam dose distribution, and scanning probe microscopy.

Publications per year

2005–2008

3

Publications

3

High resolution variable-shaped beam direct write

P. Hahmann, Lutz Bettin, Monika Boettcher et al. · Microelectronic Engineering · 2007 · 18 citations

, , +2

Determination of best focus and optimum dose for variable shaped e-beam systems by applying the isofocal dose method

Katja Keil, Kang‐Hoon Choi, Christoph Hohle et al. · Microelectronic Engineering · 2008 · 14 citations

, , +13

Results of a round robin measurement on a new CD mask standard

Fritz Gans, Roman Liebe, Jan Richter et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 12 citations

, , +16

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