Concepedia

Author

Lutz Bettin

Vistec Electron Beam (Germany)

Also Known As

L. Bettin, Lutz Bettin

6

Publications

48

Citations

4

H-Index

9

Concepts

All Affiliations

Vistec Electron Beam (Germany)
LB

About

Lutz Bettin is an author at Vistec Electron Beam (Germany) specializing in engineering, synchrotron radiation, and 3d printing.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

2

2

32

2

Applied Physics

1

1

18

3

Dosimetry

1

1

14

4

Microelectronics

1

1

18

5

3D Printing

1

1

18

Lutz Bettin

×

3

Publications

44

Citations

3

H-Index

YearCitations

High resolution variable-shaped beam direct write

P. Hahmann, Lutz Bettin, Monika Boettcher,

Microelectronic Engineering

2007

18

Determination of best focus and optimum dose for variable shaped e-beam systems by applying the isofocal dose method

Katja Keil, Kang‐Hoon Choi, Christoph Hohle,

Microelectronic Engineering

2008

14

Results of a round robin measurement on a new CD mask standard

Fritz Gans, Roman Liebe, Jan Richter,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2005

12

Page 1