Concepedia

Katja Keil

KK

Statistics

Publications

3

Citations

38

H-Index

3

Active since

2008

Affiliations

Technische Universität Dresden(Current)

Katja Keil is an author at Technische Universität Dresden specializing in engineering, microelectronics, and instrumentation.

Top concepts

Publications per year

2008–2009

3

Publications

3

Determination of best focus and optimum dose for variable shaped e-beam systems by applying the isofocal dose method

Katja Keil, Kang‐Hoon Choi, Christoph Hohle et al. · Microelectronic Engineering · 2008 · 14 citations

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Detailed characterization of hydrogen silsesquioxane for e-beam applications in a dynamic random access memory pilot line environment

Katja Keil, Kang‐Hoon Choi, Christoph Hohle et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2009 · 13 citations

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MAGIC: a European program to push the insertion of maskless lithography

L. Pain, B. Icard, S. Tedesco et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations · Full text

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