Katja Keil - Concepedia

Author

Katja Keil

Also Known As

K. Keil, Katja Keil, P. Keil, K. Rumpf & A. Jossen

Publications

Citations

H-Index

Concepts

All Affiliations

Katja Keil is an author at Technische Universität Dresden specializing in engineering, microelectronics, and instrumentation.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	38
2	Social Sciences	1	1	11
3	Applied Physics	1	1	13
4	Computer Engineering	1	1	11
5	Electrical Engineering	1	1	13

Katja Keil

Publications

Citations

H-Index

Page 1

	Year	Citations
Determination of best focus and optimum dose for variable shaped e-beam systems by applying the isofocal dose method Katja Keil, Kang‐Hoon Choi, Christoph Hohle, Microelectronic Engineering EngineeringOptimum DoseRadiation Therapy PlanningBest FocusInstrumentation	2008	14
Detailed characterization of hydrogen silsesquioxane for e-beam applications in a dynamic random access memory pilot line environment Katja Keil, Kang‐Hoon Choi, Christoph Hohle, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena Materials EngineeringNon-volatile MemoryElectrical EngineeringFtir AnalysisEngineering	2009	13
MAGIC: a European program to push the insertion of maskless lithography L. Pain, B. Icard, S. Tedesco, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE European ProgramEngineeringElectron-beam LithographyMicroscopyTarget Fabrication	2008	11

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