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Determination of best focus and optimum dose for variable shaped e-beam systems by applying the isofocal dose method

DOI

14

Citations

2

References

2008

Year

Katja Keil, Kang‐Hoon Choi, Christoph Hohle, Johannes Kretz, Tarek Lutz, Lutz Bettin, Monika Boettcher, P. Hahmann, Karl-Heinz Kliem, Bernd Schnabel,
Microelectronic Engineering

References

YearCitations

Page 1