Roman Liebe

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Active since

2001

Affiliations

Advanced Mask Technology Center (Germany)(Current)

Physikalisch-Technische Bundesanstalt

Infineon Technologies (Germany)

Roman Liebe is an author at Advanced Mask Technology Center (Germany) specializing in manufacturing engineering, engineering, and scanning probe microscopy.

Publications per year

2001–2007

Publications

Optical leak detection for wafer level hermeticity testing

Gordon Elger, Lior Shiv, Nika Nikac et al. · 2004 · 34 citations

Engineering, Electrical Engineering, Manufacturing Engineering +17

Results of a round robin measurement on a new CD mask standard

Fritz Gans, Roman Liebe, Jan Richter et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 12 citations

Engineering, Manufacturing Engineering, Biomedical Optics +16

Calibration of CD mask standards for the 65-nm node: CoG and MoSi

Jan Richter, Torben Heins, Roman Liebe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Engineering, Manufacturing Engineering, Digital Imaging +14

Mask manufacturing rule check: how to save money in your mask shop

Martin C. Keck, Wolfram Ziegler, Roman Liebe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 10 citations

Engineering, Manufacturing Engineering, Digital Fabrication +15

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