Concepedia

Publication | Closed Access

High resolution variable-shaped beam direct write

DOI

18

Citations

5

References

2007

Year

P. Hahmann, Lutz Bettin, Monika Boettcher, U. Denker, Thomas Elster, Steffen Jahr, Ulf-Carsten Kirschstein, Karl-Heinz Kliem, Bernd Schnabel
Microelectronic Engineering

References

YearCitations

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