Concepedia

Ville Saanila

VS

Statistics

Publications

6

Citations

256

H-Index

6

Active since

1997

Affiliations

University of Helsinki(Current)

ASM International

Ville Saanila is an author at University of Helsinki specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsThin FilmsChemistryCorrosionSurface ScienceNanotechnologySemiconductorsCrystallography

Publications per year

1997–2005

6

Publications

6

Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition

Kai‐Erik Elers, Ville Saanila, P. Soininen et al. · Chemical Vapor Deposition · 2002 · 94 citations

Engineering, Diffusion Barrier Materials, Step Coverage +16

Reduction of Copper Oxide Film to Elemental Copper

P. Soininen, Kai‐Erik Elers, Ville Saanila et al. · Journal of The Electrochemical Society · 2005 · 63 citations

Materials Science, Electrometallurgy, Chemical Engineering +13

Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates

Kai‐Erik Elers, Ville Saanila, W.-M. Li et al. · Thin Solid Films · 2003 · 42 citations

Materials Science, Engineering, Nanotechnology +6

[Ca(Thd)<sub>2</sub>(Tetraen)]: A Monomeric Precursor for Deposition of CaS Thin Films

Timo S. Hänninen, I. Mutikainen, Ville Saanila et al. · Chemistry of Materials · 1997 · 29 citations

Engineering, Cas Thin Films, Thin Film Process Technology +17

Atomic Layer Epitaxy Growth of BaS and BaS:Ce Thin Films from In Situ Synthesized Ba(thd)<sub>2</sub>

Ville Saanila, Jarkko Ihanus, Mikko Ritala et al. · Chemical Vapor Deposition · 1998 · 18 citations

Materials Science, Semiconductors, Situ Synthesized Ba +14

1–5 of 6