Ville Saanila

Diffusion Barrier Deposition on a Copper Surface by Atomic Layer Deposition

Kai‐Erik Elers, Ville Saanila, P. Soininen et al. · Chemical Vapor Deposition · 2002 · 96 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reduction of Copper Oxide Film to Elemental Copper

P. Soininen, Kai‐Erik Elers, Ville Saanila et al. · Journal of The Electrochemical Society · 2005 · 63 citations

Natural Sciences, Chemistry, Materials Science +15

Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates

Kai‐Erik Elers, Ville Saanila, W.-M. Li et al. · Thin Solid Films · 2003 · 42 citations

Natural Sciences, Materials Engineering, Materials Science +14

[Ca(Thd)₂(Tetraen)]:  A Monomeric Precursor for Deposition of CaS Thin Films

Timo S. Hänninen, I. Mutikainen, Ville Saanila et al. · Chemistry of Materials · 1997 · 29 citations

Natural Sciences, Chemistry, Materials Science +17

Atomic Layer Epitaxy Growth of BaS and BaS:Ce Thin Films from In Situ Synthesized Ba(thd)₂

Ville Saanila, Jarkko Ihanus, Mikko Ritala et al. · Chemical Vapor Deposition · 1998 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +14