Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates - Concepedia

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Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates

42

Citations

7

References

2003

Year

Kai‐Erik Elers, Ville Saanila, W.-M. Li, P. Soininen, Juhana Kostamo, Suvi Haukka, J. Juhanoja, W.F.A. Besling

Thin Solid Films

Materials ScienceEngineeringNanotechnologySurface ScienceApplied PhysicsChemical DepositionLayered MaterialChemical Vapor DepositionAtomic Layer Deposition

References

	Year	Citations

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