[Ca(Thd)₂(Tetraen)]: A Monomeric Precursor for Deposition of CaS Thin Films

Abstract

[Ca3(thd)6] (thd = 2,2,6,6-tetramethyl-3,5-heptanedionato) dissolved in hexane and in the presence of tetraethylenepentamine (tetraen) crystallizes as a 1:1 [Ca(thd)2(tetraen)] adduct complex in the orthorhombic Pccn space group with a = 10.874(2) Å, b = 15.480(3) Å, c = 20.866(4) Å, and Z = 4. The molecule is monomeric with an 8-coordinated calcium atom. The adduct complex volatilized at lower temperature than the nonadducted complex. [Ca(thd)2(tetraen)] can be utilized as a precursor in growth CaS thin films by the atomic layer epitaxy method. The growth rate with [Ca(thd)2(tetraen)] is lower (0.43 Å/cycle) than that with [Ca3(thd)6] (0.50 Å/cycle).