3
Publications
48
Citations
3
H-Index
2008
Active since
Affiliations
GlobalFoundries (United States)(Current)
Jeffrey Schefske is an author at GlobalFoundries (United States) specializing in electronic packaging, microfabrication, and engineering.
Top concepts
EngineeringMicrofabricationElectronic PackagingApplied PhysicsMicroelectronicsElectrical EngineeringPhysics3D PrintingGraph TheoryInstrumentation
Publications per year
2008–2012
3
3
EUV resist performance: current assessment for sub-22-nm half-pitch patterning on NXE:3300
Tom Wallow, Deniz Civay, S. Wang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 25 citations
Euv Resist Performance, Engineering, Electron-beam Lithography +16
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