Concepedia

Brad Eichelberger

BE

2

Publications

30

Citations

2

H-Index

2007

Active since

Affiliations

KLA (United States)(Current)

Brad Eichelberger is an author at KLA (United States) specializing in microelectronics, electronic packaging, and computer engineering.

Top concepts

Publications per year

2007–2008

2

Publications

2

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

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32nm overlay improvement capabilities

Brad Eichelberger, Kelly O'Brien, David Tien et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

, , +19

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