Concepedia

Kelly O'Brien

KO

1

Publications

11

Citations

1

H-Index

2008

Active since

Affiliations

SPX Corporation (United States)(Current)

Kelly O'Brien is an author at SPX Corporation (United States) specializing in electrical engineering, microelectronics, and computer-aided design.

Top concepts

3D PrintingEngineeringMicroelectronicsMicrofabricationHardware SecurityComputer EngineeringElectronic PackagingComputer ArchitectureComputer-aided DesignElectrical Engineering

Publications per year

2008–2008

1

Publications

1

32nm overlay improvement capabilities

Brad Eichelberger, Kelly O'Brien, David Tien et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

Engineering, Electron-beam Lithography, Overlay Improvement Capabilities +19

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