Concepedia

David Tien

DT

3

Publications

35

Citations

3

H-Index

2008

Active since

Affiliations

KLA (United States)(Current)

United Microelectronics (Taiwan)

David Tien is an author at KLA (United States) specializing in computer engineering, engineering, and microfabrication.

Top concepts

EngineeringMicroelectronicsMicrofabricationComputer Engineering3D PrintingHardware SecurityElectronic PackagingComputer ArchitectureComputer-aided DesignElectrical Engineering

Publications per year

2008–2014

3

Publications

3

High order correction and sampling strategy for 45nm immersion lithography overlay control

Bo Yun Hsueh, George Huang, Chun-Chi Yu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 14 citations

Physical Design (Electronics), Engineering, Advanced Packaging (Semiconductors) +10

32nm overlay improvement capabilities

Brad Eichelberger, Kelly O'Brien, David Tien et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 11 citations

Engineering, Electron-beam Lithography, Overlay Improvement Capabilities +19

Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text

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