Concepedia

Chun-Chi Yu

CY

2

Publications

24

Citations

2

H-Index

2008

Active since

Affiliations

United Microelectronics (Taiwan)(Current)

KLA (United States)

Chun-Chi Yu is an author at United Microelectronics (Taiwan) specializing in microfabrication, microelectronics, and engineering.

Top concepts

Publications per year

2008–2014

2

Publications

2

High order correction and sampling strategy for 45nm immersion lithography overlay control

Bo Yun Hsueh, George Huang, Chun-Chi Yu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 14 citations

, , +10

Techniques for improving overlay accuracy by using device correlated metrology targets as reference

Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text

Rows per page

1–2 of 2