Concepedia
1
Publications
10
Citations
H-Index
2014
Active since
Affiliations
United Microelectronics (Taiwan)(Current)
Wei Jhe Tzai is an author at United Microelectronics (Taiwan).
Publications per year
2014–2014
Techniques for improving overlay accuracy by using device correlated metrology targets as reference
Wei Jhe Tzai, Simon C. C. Hsu, Howard Chen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2014 · 10 citations · Full text
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