Ananthan Raghunathan

Thermal Stability of Gold Nanorods for High-Temperature Plasmonic Sensing

Nicholas Joy, Brian K. Janiszewski, Steven W. Novak et al. · The Journal of Physical Chemistry C · 2013 · 55 citations

Natural Sciences, Materials Engineering, Materials Science +17

Best focus shift mechanism for thick masks

Martin Burkhardt, Ananthan Raghunathan · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 28 citations

Natural Sciences, Physics, Biomedical Optics +12

Design technology co-optimization assessment for directed self-assembly-based lithography: design for directed self-assembly or directed self-assembly for design?

Kafai Lai, Chi‐Chun Liu, Hsinyu Tsai et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2017 · 15 citations

Engineering, Computer Engineering, Manufacturing Engineering +17

Revisit pattern collapse for 14nm node and beyond

Kenji Yoshimoto, Craig Higgins, Ananthan Raghunathan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +14