P. Longo

X-ray mask repair with focused ion beams

Alfred Wagner, James P. Levin, J. L. Mauer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 76 citations

Natural Sciences, Materials Science, Physics +17

MARS: Femtosecond laser mask advanced repair system in manufacturing

Richard Haight, Dennis Hayden, P. Longo et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 27 citations

Engineering, Materials Engineering, Materials Science +17

Overlay improvement roadmap: strategies for scanner control and product disposition for 5-nm overlay

Nelson Felix, Allen H. Gabor, Vinayan C. Menon et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 21 citations

Engineering, Manufacturing Engineering, Instrumentation +16

Metal deposition with femtosecond light pulses at atmospheric pressure

Richard Haight, P. Longo, Alfred Wagner · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2003 · 20 citations

Natural Sciences, Chemistry, Materials Science +17

Implementation and performance of a femtosecond laser mask repair system in manufacturing

Richard Haight, Dennis Hayden, P. Longo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 16 citations

Engineering, Manufacturing Engineering, Materials Engineering +17