Statistics
Publications
2
Citations
43
H-Index
2
Active since
1998
Affiliations
Dennis Hayden is an author at IBM Research - Thomas J. Watson Research Center specializing in mask repair, manufacturing, and microfabrication.
Publications per year
1998–1999
2
2
Implementation and performance of a femtosecond laser mask repair system in manufacturing
Richard Haight, Dennis Hayden, P. Longo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 16 citations
Engineering, Manufacturing Engineering, Materials Engineering +17
1–2 of 2