Statistics
Publications
11
Citations
777
H-Index
11
Active since
1996
Affiliations
Vinayan C. Menon is an author at Pennsylvania State University specializing in materials science, engineering, and natural sciences.
Publications per year
1996–2014
11
11
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 47 citations · Full text
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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