Statistics
Publications
3
Citations
81
H-Index
3
Active since
2013
Affiliations
Cheuk Wun Wong is an author at KLA (United States) specializing in engineering, silicon wafers, and manufacturing engineering.
Publications per year
2013–2016
3
3
Characterization of wafer geometry and overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 47 citations · Full text
Engineering, Manufacturing Engineering, Manufacturing Processes +13
Characterization and mitigation of overlay error on silicon wafers with nonuniform stress
Timothy A. Brunner, Vinayan C. Menon, Cheuk Wun Wong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 20 citations
Engineering, Materials Science, Computer-integrated Manufacturing +15
Patterned wafer geometry (PWG) metrology for improving process-induced overlay and focus problems
Timothy A. Brunner, Yue Zhou, Cheuk Wun Wong et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 14 citations
Engineering, Manufacturing Engineering, Materials Science +15
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