I. Katakabe is an author at Toshiba (Japan) specializing in electrical engineering, engineering, and surface science.
Top concepts
EngineeringApplied PhysicsSurface ScienceMaterial ScienceElectrical EngineeringVlsi DesignMicroelectronicsMicrofabricationThin FilmsInstrumentation
Publications per year
1988–2002
3
3
A NiSi salicide technology for advanced logic devices
T. Morimoto, H.S. Momose, T. Iinuma et al. · 2002 · 34 citations
Materials Science, Electrical Engineering, Nisi Salicide Technology +14
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