S. Pongratz

Production of separation-nozzle systems for uranium enrichment by a combination of X-ray lithography and galvanoplastics

Eberhard Backer, W. Ehrfeld, D. Münchmeyer et al. · Die Naturwissenschaften · 1982 · 199 citations

Materials Science, Chemical Engineering, Engineering +9

Plasma ion-assisted deposition: A promising technique for optical coatings

S. Pongratz, A. Zöller · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1992 · 77 citations

Materials Science, Optical Materials, Engineering +13

Computer simulations of resist profiles in x-ray lithography

K. Heinrich, H. Betz, A. Heuberger et al. · Journal of Vacuum Science and Technology · 1981 · 29 citations

Engineering, Electron-beam Lithography, Polycapillary Optics +18

Crirical dimension control in X-ray masks with electroplated gold absorbers

W. Windbracke, H. Betz, H.‐L. Huber et al. · Microelectronic Engineering · 1986 · 12 citations

X-ray Spectroscopy, Engineering, Health Sciences +7

Silicon X-ray masks: Pattern placement and overlay accuracy

H. Betz, H.‐L. Huber, S. Pongratz et al. · Microelectronic Engineering · 1986 · 12 citations

Geometric Modeling, Image Analysis, Engineering +10