Statistics
Publications
6
Citations
115
H-Index
6
Active since
2009
Affiliations
Maxime Gatefait is an author at STMicroelectronics (France) specializing in engineering, microelectronics, and electrical engineering.
Publications per year
2009–2015
6
6
Toward 7nm target on product overlay for C028 FDSOI technology
Maxime Gatefait, Bertrand Le-Gratiet, P.-J. Goirand et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 11 citations
Engineering, Manufacturing Engineering, Computer Architecture +16
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