Jens-Peter Zoellner

Scanning probes in nanostructure fabrication

Marcus Kaestner, Tzvetan Ivanov, Andreas Schuh et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 37 citations

Engineering, Materials Engineering, Materials Science +17

Scanning probe lithography approach for beyond CMOS devices

Z. A. K. Durrani, Mervyn Jones, Marcus Kaestner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 25 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +17

0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography

Nataliya Vorbringer-Doroshovets, Felix G Balzer, Roland Fuessl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 19 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Field-emission scanning probe lithography with self-actuating and self-sensing cantilevers for devices with single digit nanometer dimensions

Jens-Peter Zoellner, Mathias Holz, Alexander Reum et al. · 2018 · 11 citations

Engineering, Electrical Engineering, Materials Science +12