Statistics
Publications
2
Citations
30
H-Index
2
Active since
2013
Affiliations
Technische Universität Ilmenau(Current)
Roland Fuessl is an author at Technische Universität Ilmenau specializing in semiconductor devices, critical dimension metrology, and device scaling.
Publications per year
2013–2018
2
2
0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography
Nataliya Vorbringer-Doroshovets, Felix G Balzer, Roland Fuessl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 19 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
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