Statistics
Publications
1
Citations
19
H-Index
1
Active since
2013
Affiliations
Technische Universität Ilmenau(Current)
Nataliya Vorbringer-Doroshovets is an author at Technische Universität Ilmenau specializing in critical dimension control, critical dimension metrology, and overlay accuracy.
Publications per year
2013–2013
1
1
0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography
Nataliya Vorbringer-Doroshovets, Felix G Balzer, Roland Fuessl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 19 citations
Engineering, Electrical Engineering, Manufacturing Engineering +13
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