Felix G Balzer

Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

G. Jäger, Eberhard Manske, Tino Hausotte et al. · Surface Topography Metrology and Properties · 2016 · 78 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Tactile 3D microprobe system with exchangeable styli

Felix G Balzer, Tino Hausotte, Nataliya Dorozhovets et al. · Measurement Science and Technology · 2011 · 40 citations

Engineering, Manufacturing Engineering, Materials Science +14

Improved gear metrology based on the calibration and compensation of rotary table error motions

Qichang Wang, Yue Peng, Ann-Kathrin Wiemann et al. · CIRP Annals · 2019 · 24 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +14

0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography

Nataliya Vorbringer-Doroshovets, Felix G Balzer, Roland Fuessl et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 19 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13