Felix G Balzer - Concepedia

Author

Felix G Balzer

Also Known As

Balzer, Felix, F Balzer, F. Balzer, F. G. Balzer, Felix Balzer, Felix G Balzer

Publications

173

Citations

H-Index

Concepts

All Affiliations

Felix G Balzer is an author at Technische Universität Ilmenau specializing in engineering, nanofabrication, and mechanical engineering.

#	Concept	H-Index	Publications	Citations
1	Engineering	4	4	156
2	Applied Physics	2	2	93
3	Education	1	1	23
4	Biomedical Engineering	1	1	40
5	Electrical Engineering	1	1	19

Felix G Balzer

Publications

156

Citations

H-Index

Page 1

	Year	Citations
Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology G. Jäger, Eberhard Manske, Tino Hausotte, Surface Topography Metrology and Properties EngineeringMeasurementNanodevicesMechanical EngineeringInterferometry	2016	74
Tactile 3D microprobe system with exchangeable styli Felix G Balzer, Tino Hausotte, Nataliya Dorozhovets, Measurement Science and Technology NanosensorsNew DesignEngineeringMicroscopyMechanical Engineering	2011	40
Improved gear metrology based on the calibration and compensation of rotary table error motions Qichang Wang, Yue Peng, Ann-Kathrin Wiemann, CIRP Annals KinesiologyEngineeringMechanical DesignMeasurementCalibration	2019	23
0.1-nanometer resolution positioning stage for sub-10 nm scanning probe lithography Nataliya Vorbringer-Doroshovets, Felix G Balzer, Roland Fuessl, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyMicroscopyBeam LithographyNanolithography	2013	19

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