26
Publications
688
Citations
17
H-Index
2002
Active since
Marcus Kaestner is an author at Technische Universität Ilmenau specializing in applied physics, engineering, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial ScienceMicrofabricationMicroscopyNanotechnologyNanofabricationNanolithographyNanomaterialsMicroelectronics
Publications per year
2002–2020
26
26
Pattern-generation and pattern-transfer for single-digit nano devices
Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text
Engineering, Electron-beam Lithography, Pattern Transfer +20
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1–5 of 26