Statistics
Publications
26
Citations
688
H-Index
17
Active since
2002
Marcus Kaestner is an author at Technische Universität Ilmenau specializing in applied physics, engineering, and materials science.
Publications per year
2002–2020
26
26
Pattern-generation and pattern-transfer for single-digit nano devices
Ivo W. Rangelow, Ahmad Ahmad, Tzvetan Ivanov et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2016 · 42 citations · Full text
Engineering, Electron-beam Lithography, Pattern Transfer +20
1–5 of 26