Concepedia

R. G. Tarascon

RG

Statistics

Publications

6

Citations

111

H-Index

6

Active since

1985

Affiliations

AT&T (United States)(Current)

R. G. Tarascon is an author at AT&T (United States) specializing in electron beam lithography, electron beam physics, and electronic materials.

Publications per year

1985–1997

6

Publications

6

Poly(t‐BOC‐styrene sulfone)‐based chemically amplified resists for deep‐UV lithography

R. G. Tarascon, Elsa Reichmanis, Francis M. Houlihan et al. · Polymer Engineering and Science · 1989 · 28 citations

Natural Sciences, Chemistry, Materials Science +10

The SCattering with Angular Limitation in Projection Electron-Beam Lithography (SCALPEL) System

J. Alexander Liddle, Steven D. Berger, C. J. Biddick et al. · Japanese Journal of Applied Physics · 1995 · 21 citations

Engineering, Electrical Engineering, Electronic Materials +8

Preliminary results from a prototype projection electron-beam stepper-scattering with angular limitation projection electron beam lithography proof-of-concept system

L. R. Harriott, S. D. Berger, C. J. Biddick et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 21 citations

Engineering, Manufacturing Engineering, Materials Engineering +14

Lithographic evaluation and processing of chlorinated polymethylstyrene

Mark A. Hartney, R. G. Tarascon, Anthony E. Novembre · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 18 citations

Natural Sciences, Materials Engineering, Materials Science +17

The SCALPEL proof of concept system

L. R. Harriott, S. D. Berger, C. J. Biddick et al. · Microelectronic Engineering · 1997 · 12 citations

Social Sciences, Mathematics, Knowledge Representation +3

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