Concepedia

R. Patlolla

RP

Statistics

Publications

22

Citations

743

H-Index

17

Active since

2013

Affiliations

IBM (United States)(Current)

GlobalFoundries (United States)

University at Albany, State University of New York

Clarkson University

Albany Technical College

R. Patlolla is an author at IBM (United States) specializing in materials science, electronic materials, and semiconductor devices.

Publications per year

2013–2024

22

Publications

22

Citric Acid as a Complexing Agent in Chemical Mechanical Polishing Slurries for Cobalt Films for Interconnect Applications

R. Popuri, K. V. Sagi, S. R. Alety et al. · ECS Journal of Solid State Science and Technology · 2017 · 76 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Future on-chip interconnect metallization and electromigration

Chunhua Hu, James J. Kelly, Huai Huang et al. · 2018 · 70 citations

Engineering, Electrical Engineering, Materials Science +17

Tungsten and cobalt metallization: A material study for MOL local interconnects

V. Kamineni, M. Raymond, S. Siddiqui et al. · 2016 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +17

A 14 nm Embedded STT-MRAM CMOS Technology

D. Edelstein, Michael Rizzolo, Devika Sil et al. · 2020 · 58 citations

Engineering, Computer Engineering, Electrical Engineering +16

BEOL Cu CMP Process Evaluation for Advanced Technology Nodes

Kunaljeet S. Tanwar, D. Canaperi, Michael Lofaro et al. · Journal of The Electrochemical Society · 2013 · 53 citations

Engineering, Materials Engineering, Materials Science +15

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